Set of installations for obtaining high-purity hydride materials by rectification

HYDRID

Purpose:

Obtaining high-purity hydride materials of 99,99994 qualification by periodic low-temperature rectification on industrial scale.

Special characteristics

Scheme

• Hydrides: Salut 5 – phosphine (PH₃), Salut 6 – silicomethane (SiH₄), Salut 7 – silicomethane (SiH₄), Salut 8 – ammonia (NH₃);
• Automated control;
• Chemically-stable vacuum pumping system;
• Dimensions of the technological shafts for each column — 5 × 1.0 × 6.8 m;
• Consumed power not more than 20 kW.