Small – scale installation for film deposition by magnetron sputtering
Deposition of metal films and resistive materials by magnetron sputtering.
- Type and quantity of magnetron sputtering device in the installation: DC magnetron sputtering device — 1 pc.;
- Substrate processing in one technological cycle (double-sided processing): 60 x 48 mm – 6 pcs.;
- Microprocessing control system;
- Oil-free pumping system (turbomolecular pumps 300 l/h);
- Consumed power not more than 4,5 kW;
- 2,5 m2 area per one plant.