Small-scale installation for thermal annealing
Purpose:
Thermal annealing and drying of materials, layers and structures.
Special characteristics:
- Table working surface – Ø 180 mm;
- Microprocessing control system;
- Oil-free pumping system (turbomolecular pumps 60 l/h);
- Substrate heating up to 400 °C;
- Consumed power not more than 4,5 kW;
- 2,5 m2 area per one plant.
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