Small-scale  installation for plasma-chemical cleaning, photoresist stripping and sterilization

PLASMA TM 4

Purpose:

Photoresist stripping and cleaning from organic impurities on plates and sterilization of medical instruments including thermolabile instruments and materials.

Special characteristics

Scheme

• Group processing of 20 plates up to Ø 100, 150 mm, disposed in the quartz boat;
• Sterilization of medical instruments, devices, containers, medical utensils, etc.;
• Working gases –O₂, N₂;
• Maintaining the stability of HF discharge within the range of working pressure 10-100 Pascal;
• Microprocessing control system;
• Forvacuum pumping system;
• Consumed power not more than 4,5 kW;
• 2,5 m² area per one plant.