RESEARCH INSTITUTE OF PRECISION MACHINE MANUFACTURING
MVU TM PLASMA 04
Small-scale installation for plasma-chemical cleaning, photoresist stripping and sterilization
PLASMA TM 4
Purpose:
Photoresist stripping and cleaning from organic impurities on plates and sterilization of medical instruments including thermolabile instruments and materials.
Special characteristics
Scheme
Group processing of 20 plates up to Ø 100, 150 mm, disposed in the quartz boat;
Sterilization of medical instruments, devices, containers, medical utensils, etc.;
Working gases –O2, N2;
Maintaining the stability of HF discharge within the range of working pressure 10-100 Pascal;