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MVU TM TIS 02

Small-scale installation for film deposition by thermal evaporation

мву тм тис 02

Purpose:

Film deposition by thermal evaporation.

Special characteristics:

  • Substrate processing in one technological cycle (single-sided processing): 60 x 48 mm – 6 pcs.;
  • Microprocessing control system;
  • Oil-free pumping system (turbomolecular pumps 300 l/h);
  • Consumed power not more than 4,5 kW;
  • 2,5 marea per one plant.

мву тм тис 02фото1      mvutis2

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