Small-scale installation for film deposition by thermal evaporation

MVU TM TIS 02

Purpose:

Film deposition by thermal evaporation.

Special characteristics

Scheme

• Substrate processing in one technological cycle (single-sided processing): 60 x 48 mm – 6 pcs.;
• Microprocessing control system;
• Oil-free pumping system (turbomolecular pumps 300 l/h);
• Consumed power not more than 4,5 kW;
• 2,5 m² area per one plant.