RESEARCH INSTITUTE OF PRECISION MACHINE MANUFACTURING
MONOOXID
Installation for obtaining high-purity materials and nanopowder synthesis in vacuum
MONOOXID
Purpose:
Realization of technological processes of high-purity materials obtaining
such as high-temperature processing of materials and parts in vacuum,
nanopowder synthesis, distillation and coating of materials.
Special characteristics
Scheme
Revolvable plasma reactor of Ø 130 mm;
HF heating up to 2100° C;
Reactor tilting and revolving system;
Oil-free (dry) pumping system (forevacuum and turbomolecular pumps);