Desktop installation for film deposition by thermal evaporation
Purpose:
Film deposition by thermal evaporation.
Special characteristics:
- Substrate processing in one technological cycle (single-sided processing): 60 x 48 mm – 1 pc.;
- Microprocessing control system;
- Oil-free pumping system (turbomolecular pumps 60 l/h);
- Consumed power not more than 4,5 kW;
- 1,5 m2 area per one plant.