RESEARCH INSTITUTE OF PRECISION MACHINE MANUFACTURING
OXID TM-1
Small-scale installation for the diffusion, oxidation and annealing of plates and materials at standard pressure
OXID TM 1
Purpose:
Automatic thermal processing of plates and materials (diffusion, oxidation, annealing, diffusant rectification, reconstruction of crystalline structures) at standard pressure.
Special characteristics
Scheme
Group processing of 120 substrates up to Ø 100 mm;