RESEARCH INSTITUTE OF PRECISION MACHINE MANUFACTURING
OTJIG TM-4M
Small-scale installation for thermal processing
of plates and materials in gas environment
OTJIG TM 4M
Purpose:
Automatic thermal processing of plates and materials (annealing, drying,
diffusant rectification, reconstruction of crystal structures)
at standard pressure in reducing or neutral environment.
Special characteristics
Scheme
Group processing of 120 substrates up to Ø 100 mm;
Quartz reactor with sealed working area of 700 mm;