System for automatic feed
of tetraethyl orthosilicate reagent
with thermostatic control
for diffusion process

TEOS

Purpose:

Precision reagent feeding (tetraethyl orthosilicate) with automatic refilling from reserve tank with setpoint temperature to reactor of technological equipment.

Special characteristics

Scheme

• Automatic mode;
• Principle of nitrogen saturation in the process of its barbotage through tetraethyl orthosilicate;
• Thermostatic control in 3 independent subsystems;
• Consumed power not more than 2 kW.