Set of installations for obtaining high-purity chloride materials by rectification

CHLORID TM

Purpose:

Obtaining high-purity chloride materials of 99,99994 qualification by periodic high-temperature rectification on industrial scale.

Special characteristics

Scheme

• Chlorides: Salut1 – silicon tetrachloride (SiCl₄), Salut2 – trichlorosilane (SiHCl₃), Salut3 – germanium tetrachloride (GeCl₄), Salut4 – arsenic trichloride (AsCl₃).
• Automated control
• Chemically-stable vacuum pumping system;
• Dimensions of the technological shafts for each column — 1.5 × 1.0 × 6.8 m;
• Consumed power not more than 20 kW.