Set of installations for obtaining high-purity chloride materials by rectification
Obtaining high-purity chloride materials of 99,99994 qualification by periodic high-temperature rectification on industrial scale.
- Chlorides: Salut1 – silicon tetrachloride (SiCl4), Salut2 – trichlorosilane (SiHCl3), Salut3 – germanium tetrachloride (GeCl4), Salut4 – arsenic trichloride (AsCl3).
- Automated control
- Chemically-stable vacuum pumping system;
- Dimensions of the technological shafts for each column — 1.5 × 1.0 × 6.8 m;
- Consumed power not more than 20 kW.