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CHLORID

Set of installations for obtaining high-purity chloride materials by rectification

хлорид-1

Purpose:

Obtaining high-purity chloride materials of 99,99994 qualification by periodic high-temperature rectification on industrial scale.

Special characteristics:

  • Chlorides: Salut1 – silicon tetrachloride (SiCl4), Salut2 – trichlorosilane (SiHCl3), Salut3 – germanium tetrachloride (GeCl4), Salut4 – arsenic trichloride (AsCl3).
  • Automated control
  • Chemically-stable vacuum pumping system;
  • Dimensions of the technological shafts for each column — 1.5 × 1.0 × 6.8 m;
  • Consumed power not more than 20 kW.

chlorid       хлорид-3

 

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