Installation for liquid-phase epitaxy of structures

EPIGRAN ТМ

Purpose:

Obtaining epitaxial ferrogarnet, cylindrical magnet domains
and other structures from liquid phase.

Special characteristics

Scheme

• Single-piece epitaxy on Ø76, 100 mm substrates;
• Five zones for furnace heating and 1 zone for crucible heating ;
• Working temperature range – 300-1200 ° C;
• Microprocessing control system;
• Consumed power not more than 17 kW;
• 5 m² area per one plant.