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EPIGRAN TM

Installation for liquid-phase epitaxy of structures

эпигрантм-1

 

Purpose:

Obtaining epitaxial ferrogarnet, cylindrical magnet domains and other structures from liquid phase.

Special characteristics:

  • Single-piece epitaxy on Ø76, 100 mm substrates;
  • Five zones for furnace heating and 1 zone for crucible heating ;
  • Working temperature range – 300-1200 ° C;
  • Microprocessing control system;
  • Consumed power not more than 17 kW;
  • 5 marea per one plant.

epigran

 

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