Installation for liquid-phase epitaxy of structures
Obtaining epitaxial ferrogarnet, cylindrical magnet domains and other structures from liquid phase.
- Single-piece epitaxy on Ø76, 100 mm substrates;
- Five zones for furnace heating and 1 zone for crucible heating ;
- Working temperature range – 300-1200 ° C;
- Microprocessing control system;
- Consumed power not more than 17 kW;
- 5 m2 area per one plant.