Magnetron sputtering devices

PLANAR MAGNETRON (Ø 50 ММ)

PLANAR MAGNETRON (Ø 100 ММ)

• Maximum power – 1,5 kW;
• Target size: diameter – 50 mm, thickness – 4 mm;
• Connecting nominal inside diameter – 40 mm;
• Dimension:69×80 mm;
• Weight – 2,5 kg.

• Maximum power – 2,5 kW;
• Target size:
  Diameter – 100 mm;
  Thickness – 6 mm.
• Connecting nominal inside diemeter — 40 mm;
• Dimensions: 140×150 mm;
• Weight: 4 kg.

PLANAR MAGNETRON (Ø 280 мм)

MULTI-CATHODE MAGNETRON BASED ON PLANAR MAGNETRON (3 х Ø 100 мм)

• Maximum power – 8 kW;
• Target size: diameter – 280 mm, thickness – 10 mm;
• Rotating magnet system;
• Connecting nominal inside diameter – 320 mm;
• Dimension:400×210 mm;
• Weight – 28 kg.

• Maximum power – 7,5 kW;
• Target size: diameter – 100 mm; thickness – 6 mm;
• Connecting nominal inside diameter – 320 mm;
• Dimension: 360×230 mm;
• Weight – 24 kg.

CYLINDRICAL MAGNETRON (L= 470 мм)

• Maximum power – 9 kW;
• Target size: inside diameter – 114 mm, length – 270 mm;
• Connecting nominal inside diameter – 160 mm;
• Dimension:574x220x180 mm;
• Weight – 8,3 kg.