+7(495)229-75-01
+7(499)735-13-69 - Marketing department
Contact us
E-mail
marketing@niitm.ru
Address
Zelenograd, Panfilovsky Prospekt, 10
Operating mode
Mon - Thu: 08:30 - 17:30
Fri: 08:30 - 16:15
Contact us
About the company
  • About the company
  • Development history
Equipment
  • Classification of equipment
    • Plasma Chemical etching – PCE
    • Plasma chemical deposition – PCD
    • Physical deposition - PVD
    • Growing epitaxial structures
    • Heat treatment
    • Precision cleaning
  • Cluster equipment
    • PCD
    • PCE
    • PVD
  • New developments
  • Catalog search
Contacts
Zelenograd, Panfilovsky Prospekt, 10
+7(495)229-75-01
+7(499)735-13-69 - Marketing department
Contact us
E-mail
marketing@niitm.ru
Address
Zelenograd, Panfilovsky Prospekt, 10
Operating mode
Mon - Thu: 08:30 - 17:30
Fri: 08:30 - 16:15
About the company
  • About the company
  • Development history
Equipment
  • Classification of equipment
    Classification of equipment
    • Plasma Chemical etching – PCE
    • Plasma chemical deposition – PCD
    • Physical deposition - PVD
    • Growing epitaxial structures
    • Heat treatment
    • Precision cleaning
  • Cluster equipment
    Cluster equipment
    • PCD
    • PCE
    • PVD
  • New developments
    New developments
  • Catalog search
    Catalog search
Contacts
    About the company
    • About the company
    • Development history
    Equipment
    • Classification of equipment
      Classification of equipment
      • Plasma Chemical etching – PCE
      • Plasma chemical deposition – PCD
      • Physical deposition - PVD
      • Growing epitaxial structures
      • Heat treatment
      • Precision cleaning
    • Cluster equipment
      Cluster equipment
      • PCD
      • PCE
      • PVD
    • New developments
      New developments
    • Catalog search
      Catalog search
    Contacts
      +7(499)735-13-69 - Marketing department
      Contact us
      E-mail
      marketing@niitm.ru
      Address
      Zelenograd, Panfilovsky Prospekt, 10
      Operating mode
      Mon - Thu: 08:30 - 17:30
      Fri: 08:30 - 16:15
      Phone
      +7(499)735-13-69 - Marketing department
      Свяжитесь с нами
      • About the company
        • About the company
        • About the company
        • Development history
      • Equipment
        • Equipment
        • Classification of equipment
          • Classification of equipment
          • Plasma Chemical etching – PCE
          • Plasma chemical deposition – PCD
          • Physical deposition - PVD
          • Growing epitaxial structures
          • Heat treatment
          • Precision cleaning
        • Cluster equipment
          • Cluster equipment
          • PCD
          • PCE
          • PVD
        • New developments
        • Catalog search
      • Contacts
      Contact us
      • +7(499)735-13-69 Marketing department
        • Phones
        • +7(499)735-13-69 Marketing department
        • Order a call
      • Zelenograd, Panfilovsky Prospekt, 10
      • marketing@niitm.ru
      • Mon - Thu: 08:30 - 17:30
        Fri: 08:30 - 16:15
      Адаптация пот требования заказчика

      EQUIPMENT ADAPTATION
      TO CUSTOMER REQUIREMENTS

      CONDUCTING R&D TO DEVELOP
      NEW AND PROMISING AREAS

      THE NEW TYPES
      EQUIPMENT DEVELOPMENT

      FORMATION OF FULL-FLEDGED
      PRODUCTION LINES

      News about developments

      Research Institute for Precision Machine Manufacturing (SC NIITM) is the oldest development and production domestic school of special technological equipment (STE). The company has large production capacities. For 62 years institute has become a center for the knowledge transfer between generations of scientists and specialists.

      Due to our extensive experience and quick adaptation to the modern market, we offer high-quality services for the development and production of modern vacuum-plasma and physical-thermal equipment for microelectronic industry.

      Currently NIITM is the only enterprise in Russia engaged in developing cluster complexes and manufacturing plants for processing 12-inch wafers.

      The key vector of work is the equipment for processing 8-inch wafers with the possibility of integration into the "clean room". It is also compatible with 4-inch and 6-inch wafers. The plants have different types of loading depending on wafers diameter (loadlock, from cassette to cassette, SMIF). The product line complies with SEMI standards.

      JSC NIITM is one of the leading manufacturers of special technological equipment (STE) in Russia.


      Read more
      Разработка двухперспективных систем
      JSC NIITM has begun developing two promising plants for plasma-chemical processing of silicon wafers up
      to 200 mm.
      Chemical vapor deposition of tungsten.
      Chemical vapor deposition of
      SiO2 / SiON / SiGe.
      Areas of activity

      Currently, NIITM is a leader among domestic enterprises developing of special technological equipment for the microelectronic industry.

      The key vector of work is the series production of equipment for 200 mm wafers processing, compatible with 100 and 150 mm with the possibility of combining technological modules into a cluster complex.

      Company specialization:

      • Supply and adaptation of equipment for the Customer technological tasks.
      • Development of the new types STE according to the technical specifications.
      • Comprehensive supply of special technological equipment for the full-fledged production lines formation using the engineering potential of JSC NIITM.
      • Conducting R&D on the development of innovative and promising technological equipment in cooperation with scientific and industrial enterprises.
      • Conducting R&D on the development of the new and promising areas with the involvement wide range companies in terms of equipment supply and BTP development.

      The product line complies with SEMI standards.

      Read more
      More than 60 years in the history of Microelectronics!
      NIITM developed and designed the equipment on which the entire soviet electronic component base was created. In the 60-80s, the company was actually the only major developer of vacuum-plasma and physico-thermal equipment in the country. The development of such equipment in the USSR was the most important base for the production of semiconductor technology.
      Поставка и адаптация оборудования под задачи Заказчика
      Разработка новых видов СТО по техническому заданию
      Формирование полноценных производственных линий с использованием инжинирингового потенциала
      Проведение НИОКР по разработке инновационного и перспективного технологического оборудования

      About the company

      Research Institute for Precision Machine Manufacturing (JSC NIITM) is the oldest development and production domestic school of special technological equipment (STE). The company has large production capacities. For 62 years institute has become a center for the knowledge transfer between generations of scientists and specialists.

      Due to our extensive experience and quick adaptation to the modern market, we offer high-quality services for the development and production of modern vacuum-plasma and physical-thermal equipment for microelectronic industry.

      Currently NIITM is the only enterprise in Russia engaged in developing cluster complexes and manufacturing plants for processing 12-inch wafers.

      The key vector of work is the equipment for processing 8-inch wafers with the possibility of integration into the "clean room". It is also compatible with 4-inch and 6-inch wafers. The plants have different types of loading depending on wafers diameter (loadlock, from cassette to cassette, SMIF). The product line complies with SEMI standards.

      JSC NIITM is one of the leading manufacturers of special technological equipment (STE) in Russia.

      History of development
      Contacts

      Leave a request

      We will discuss the tasks, find the optimal solution and plan the work. We will answer the questions and tell you more about our equipment.
      We will be in touch: +7 (499) 735-13-69 - Marketing department
      Company
      About the company
      Development history
      Equipment
      Classification of equipment
      Cluster equipment
      New developments
      Catalog search
      Contacts
      +7(495)229-75-01
      +7(499)735-13-69 - Marketing department
      Contact us
      E-mail
      marketing@niitm.ru
      Address
      Zelenograd, Panfilovsky Prospekt, 10
      Operating mode
      Mon - Thu: 08:30 - 17:30
      Fri: 08:30 - 16:15
      marketing@niitm.ru
      Zelenograd, Panfilovsky Prospekt, 10
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