Cluster TM-200
High-performance automated movement of plates with a diameter of 200 mm
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Specifications:
Possibility of integration into a clean room
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Yes
Wafer diameter
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200mm
Wafer loading
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SMIF container
Цена действительна только для интернет-магазина и может отличаться от цен в розничных магазинах
Cluster TM-200
Technical specifications:
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A transport chamber with six ports;
four ports for process (processor) cameras;
- two ports for airlock chambers with loading and unloading plates;
- the presence of a vacuum manipulator in the transport chamber;
- The presence of an atmospheric manipulator in a streamlined module and plate overload;
- two SMIF containers with cassettes for plates;
- provided plate reloading module between the SMIF containers and the airlock chambers;
- the possibility of additional embedding in the clean area of the complex only with SMIF containers;
- any of the eight technological (process) modules of the installation can be docked to the vacuum transport system, such as : Magna TM 200-01, Magna TM 200-04, plasma TM 200-01, plasma TM 200-02, plasma TM 200-03, plasma TM 200-04, isophase TM 200-01, isophase TM 200-02, BTO TM 200-01.
Warranty and post-warranty service;
The possibility of upgrading and reconfiguring equipment to meet customer requirements.