CLUSTER TM-200
High-performance robotic vacuum transfer system, designed for automated wafer transfer between process modules for 200 mm wafers
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Specifications:
Possibility of integration into a clean room
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Yes
Wafer diameter
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200mm
Wafer loading
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From cassette to cassette, Loadlock, SMIF container
Цена действительна только для интернет-магазина и может отличаться от цен в розничных магазинах
CLUSTER TM-200
Specifications:
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A transfer system with six ports, four of them for process chambers:
- two ports for loadports;
- a vacuum manipulator in the transport chamber;
- an atmospheric manipulator in the dust-free module and wafer handling unit;
- two SMIF containers
- a dust-free wafer handling module between SMIF containers and loadlock chambers;
- optional integration into the clean area only from the side of SMIF containers;
- any of 8 process modules can be attached to the transfer system: MAGNA TM 200-01, MAGNA TM 200-04, PLASMA TM 200-01, PLASMA TM 200-02, PLASMA TM 200-03, PLASMA TM 200-04, ISOPHAZ TM 200-01, ISOPHAZ TM 200-02, BTO TM 200-01.
Warranty and post-warranty service;
The possibility of upgrading and reconfiguring equipment to meet customer requirements.