The ability to be part of a cluster
Yes
Possibility of integration into a clean room
Yes
Wafer diameter
Up to 100mm, 150mm, 200mm
Wafer loading
From cassette to cassette, Loadlock, SMIF container
Ion-alloyed layers annealing; ohmic contacts formation; metal silicides, thin oxide and dielectric films production; amorphous and polycrystalline films recrystallization, etc.