Wafer diameter
200mm, 300mm
Wafer loading
FOUP container, SMIF container
The cluster system is designed for plasma chemical deposition (CVD) with up to 65 nm design rules
Wafer diameter
200mm
Wafer loading
From cassette to cassette, Loadlock, SMIF container
High-performance robotic vacuum transfer system, designed for automated wafer transfer between process modules for 200 mm wafers